"Modeling of Modern Plasma Processing Reactors: Plasma Physics and Surface Chemistry"

Dr. Igor KAGANOVICH

Princeton Plasma Physics Laboratory, USA

"Large-Scale Synthesis of 2-Dimensional Transition Metal Dichalcogenides (TMDCs) by Low-Temperature Plasma and their Applications"

Prof. Taesung Kim

Sungkyunkwan University, Korea

"Plasma Monitoring in Semiconductor Manufacturing: Yesterday, Today and Tomorrow - Tiny Things make Wonder"

Dr. Yongjin KIM

SK Hynix Inc., Korea

"Asymmetry and Instability in Capacitively Coupled Plasmas Sustained in Electronegative Mixed Gases"

Prof. Yuan-Hong SONG

Dalian University of Technology, China

“Plasma Assisted Atomic Layer Etching of 2D Materials”

Prof. Geun Young YEOM

Sungkyunkwan University, Korea

"Recent Trends in Semiconductor Manufacturing Equipment"

Dr. Seok-min YUN

Samsung Electronics Co., Ltd., Korea