Invited Speakers
Topic A. Plasma Processes for Device & Nanomaterial Application
Topic B. Plasma Diagnostics & Processing Monitoring
Topic C. Innovative Industrial Plasma Technology
Topic D. Plasma Modeling & Simulation
Topic E. Plasma Processes for Low Global Warming Potential (GWP) Gas Applications
Topic F. Plasma Bio-Medicine & Environments
Topic G. 2D Materials and Nano/Micro Device Applications
Topic H. Advanced Silicon based Semiconductor Devices
Topic I. Flexible and Stretchable Devices
Topic J. Energy and Environment Related Devices
Topic K. Interconnect and Packaging
"Plasma Atomic Layer Etching for Metals and Dielectric Materials"
Prof. Heeyeop Chae (Sungkyunkwan Univ., Korea)
Heeyeop Chae received his B.S. and M.S. in chemical engineering from Seoul National University and his Ph.D. in chemical engineering from Massachusetts Institute of Technology. After his Ph.D. he joined Applied Materials, Inc., a semiconductor equipment company in California, USA as a senior process engineer (2000–2004). He has been working as a professor in the School of Chemical Engineering at SKKU since 2004. His research interests include plasma etching and deposition processes, plasma monitoring, and quantum dot materials and display devices.
"Process and Equipment of TEL for the Advanced Technology"
Dr. Young Woo Park (Tokyo Electron Korea, Korea)
He joined Samsung Electronics DS in 1987 and worked for about 29 years. The main working areas were the process integration of DRAM and NAND.
His major achievements include the world's first development of 256MDRAM and the world's first development of CTF NAND Flash. And he was awarded the proud Samsung People's Award twice for his work. He was also selected as the Master at 2009 for the first time in Samsung.
In addition, he served as a professor of EE at Korea University for two and half years.
Since 2018, he has served as Senior Tech GM (CTO, EVP) at Tokyo Electron Korea. He has 142 US patents and won the Industry Minister's Award at 2000 in patent area. He received his Ph.D. from UCLA EE.
His major achievements include the world's first development of 256MDRAM and the world's first development of CTF NAND Flash. And he was awarded the proud Samsung People's Award twice for his work. He was also selected as the Master at 2009 for the first time in Samsung.
In addition, he served as a professor of EE at Korea University for two and half years.
Since 2018, he has served as Senior Tech GM (CTO, EVP) at Tokyo Electron Korea. He has 142 US patents and won the Industry Minister's Award at 2000 in patent area. He received his Ph.D. from UCLA EE.
“Quantifying the States of Semiconductor Process Chambers and its Application”
Dr. Inshik Bae (Aether Inc, Korea)
Dr. Bae received a B.S. from the Korea Advanced Institute of Science and Technology (KAIST) in 2010, and Ph.D. in Plasma Physics from the Korea Advanced Institute of Science and Technology (KAIST) in 2017. And he conducted post-doctoral fellowship from 2017 to 2019 in KAIST.
Since 2019, he has been working as a senior researcher in Aether Inc, startup company. His interests are plasma etching, plasma diagnostics, nano-particle synthesis, and semiconductor process chamber diagnostics. He is focusing on developing a way to quantify semiconductor process chamber. So users may get some numbers which inform the status of the chamber.
Since 2019, he has been working as a senior researcher in Aether Inc, startup company. His interests are plasma etching, plasma diagnostics, nano-particle synthesis, and semiconductor process chamber diagnostics. He is focusing on developing a way to quantify semiconductor process chamber. So users may get some numbers which inform the status of the chamber.
“Non-invasive Plasma Diagnostics for Plasma Process Monitoring”
Dr. Si-Jun Kim (Chungnam Nat’l Univ., Korea)
Dr. Kim earned his Bachelor of Science in Physics from Chungnam National University in 2015 and completed his Ph.D. in Physics at Chungnam National University in 2023. Since 2023, he has been serving as a post-doctoral research fellow at Chungnam National University. Dr. Kim has 40 publications, with 16 of them where he was the first or corresponding author. Additionally, he has 14 patents, including PCT and US patents. His research interests encompass plasma physics, plasma sources, plasma etching, plasma/radicals diagnostics, and plasma process monitoring. Specifically, he focuses on topics such as the radio-frequency breakdown mechanism, arcing formation mechanism, low-pressure plasma sources (below 1 mTorr), high-aspect ratio (HAR) etching, microwave probes, as well as non-invasive probes like voltage-current probes, planar microwave probes, and other related techniques.
“Investigation of Curling Probe for Industrial Application”
Prof. Ogawa Daisuke (Chubu Univ., Japan)
Daisuke Ogawa was born in Sapporo, Hokkaido, JAPAN. He received his Ph.D. from the University of Texas at Dallas in 2012. He is currently an associate professor at the Department of Electrical and Electronic Engineering at Chubu University. His research interest is application-oriented science with the use of low-temperature plasma. Recently, he has had a lot of research activities in plasma diagnostic with a curling probe and carbon nanotube functionalization with low-temperature plasma. For more details, please visit his academic website at https://www.isc.chubu.ac.jp/d_ogawa/.
“E-Matcher – Game Changer in Fast and Accurate Processing of Plasma Power Sources”
Prof. Yongsug Suh (Jeonbuk Nat’l Univ., Korea)
Yongsug Suh was born in Seoul, Korea. He received his B.S. and M.S. in Electrical Engineering from Yonsei University, Seoul, Korea, in 1991 and 1993, respectively, and his Ph.D. in Electrical Engineering from the University of Wisconsin, Madison, WI, USA, in 2004. From 1993 to 1998, he was an Application Engineer in the Power Semiconductor Division of Samsung Electronics Co. From 2004 to 2008, he was a Senior Engineer in the Power Electronics and Medium Voltage Drives Division of ABB, Turgi, Switzerland. Since 2008, he has been with the Department of Electrical Engineering, Jeonbuk National University, Jeonju, Korea, where he is currently a Professor. His current research interests include the power conversion systems of high power for renewable energy sources, plasma applications and medium voltage electric drive systems.
- · Associate Editor in IEEE Transactions on Industry Applications
- · Guest Associate Editor in IEEE Journal of Emerging and Selected Topics in Power Electronics
- · Vice chair of Industrial Power Converters Committee of IEEE IAS
- · Vice chair of Technical Program Committee of ECCE 2020, 2021, 2022, 2023
- · Organizing committee chair of ICPE 2023 – ECCE Asia
“TCAD Augmented Generative Adversarial Network for Hot-spot Detection and Mask-layout Optimization in HARC Etch Process”
Dr. Hyoungcheol Kwon (SK Hynix, Korea)
Hyoungcheol Kwon, Ph.D. has been Tech Leader at SK Hynix since 2013. He currently serves as a head of the TCAD Cell team at SK Hynix. His research topics are DRAM & NAND Cell device characteristics and authentic profile-based device simulation include TCAD augmented MTS optimizer and platform path-finder. Prior to this role, he had worked at TCAD Process team with responsibility of plasma etch/deposition process modeling and finding solutions for productivity improvement in DRAM, NAND, and New Memory from 2013 to 2022. During this period, he had led a group of engineers working on etch profile estimation for various RCP & layout and finding correlation between RCP and profiles in HARC etching.
Kwon received a Ph.D. degree in Electrical Engineering from POSTECH, Pohang, S. Korea. He studied electron kinetics in low temperature plasmas through particle-in-cell Monte Carlo simulation. His expertise includes plasma modeling & simulation for various pressure (~atmospheric pressure) plasmas.
Kwon received a Ph.D. degree in Electrical Engineering from POSTECH, Pohang, S. Korea. He studied electron kinetics in low temperature plasmas through particle-in-cell Monte Carlo simulation. His expertise includes plasma modeling & simulation for various pressure (~atmospheric pressure) plasmas.
“Discharge Characteristics and Dynamics of Atmospheric Micro-pore Pulsed Dielectric Barrier Discharge”
Prof. Jianjun Shi (Fudan Univ., China)
Prof. Jianjun Shi received the B.Sc. and M.Sc. degrees in physics from Nanjing University, China in 1999 and 2002, respectively, and the Ph.D. degree in electrical and electronic engineering from Loughborough University, Loughborough, U.K., in 2005., He joined Donghua University, Shanghai, China in 2007 and Yiwu research institute of Fudan University in 2023. His current research interests include atmospheric pressure glow discharges and their applications on material science and technology.
“Computational Approaches for Low-GWP Alternative Gas Development”
Dr. Heechoi Choi (KFE, Korea)
Heechol Choi is working as a Lead Researcher at the Plasma Technology Research Institute under the Korea Institute of Fusion Energy, Gunsan, South Korea. He has been conducting computational research on the physical and chemical properties of gases used in semiconductor processes, mainly using the DFT method. He is interested in the chemical reaction mechanisms of F-containing molecules using kinetics data and is currently focusing on the research project for developing low-GWP PFC/HFC alternative gases applying various theoretical methods.
“Ensuring Sustainability of Etch Technology”
Master. Sung-Il Cho (Samsung Electronics Co., Ltd., Korea)
Master(vice president of technology) Sung-Il Cho is in charge of developing the high aspect ratio contact etching technology in DRAM and VNAND devices. He joined Samsung Electronics in 2002, right after receiving Ph. D from the Department of Chemical Engineering at Seoul National University. He worked at Semiconductor Research and Development until 2017, where he developed several generations of DRAM and VNAND. Currently he works at Memory Manufacturing Technology Center solving the technical challenges for deep hole and trench patterning to improve the productivity and yield.
“Reducing Carbon Footprint in Dry Etching Toward Sustainable Semiconductor Manufacturing”
Dr. Huichan Seo (SK Hynix Inc., Korea)
Huichan Seo, Ph.D. has been the Head of Etch Technology and the Program Leader of DRAM Front-End Patterning at SK Hynix for 5 years with responsibility for New Etching Gas Development, Simulation based Etching Technology Development and DRAM Front-End Patterning, which includes ISO STI, Buried Gate and High-k metal gate etching. Prior to joining SK Hynix, Seo was Senior Process Engineer at Intel. During his 10 years at Intel, Seo had responsibility for Tri-Gate Pattering, Fin Patterning and other Pathfinding Projects. He got 2 times IAA (Intel Achievement Award) for his great contribution on 3D transistor patterning and Device performance enhancement. Seo received a Ph.D. degree in Material Science and Engineering from University of Illinois at Urbana-Champaign, Champaign, IL, USA and Master/Bachelor degree in Material Science and Engineering from Seoul National University, Korea.
“Lifetime of Nitric Oxide Produced by Surface Dielectric Barrier Discharges in Controlled Atmospheres”
Dr. Hyungyu Lee (KAIST, Korea)
Dr. Lee earned his Bachelor of Science in Physics from Korea Advanced Institute of Science and Technology (KAIST) in 2017, and he earned his Ph.D. in Plasma Physics from KAIST in 2023. Since 2023, he has held the position of a post-doctoral research fellow at KAIST. His research interests are plasma physics, plasma chemistry, plasma diagnostics, and plasma simulation. His research focuses on understanding plasma physics and chemistry and finding suitable methodologies for plasma applications.
“Understanding Plant Molecular Response to Low-temperature Plasma Irradiation”
Prof. Kazunori Koga (Kyushu University, Korea)
Kazunori Koga received D. Sc. degree in 1994 and 1999 from the Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Japan. He was worked as Research Associate from 1999 to 2007, an Assistant Professor from 2007 to 2009 in Faculty of Information Science and Electrical Engineering, Kyushu University, Japan. He was working as Associate Professor in Faculty of Information Science and Electrical Engineering, Kyushu University from 2009 to 2018. Since 2018 till now, he is working as Professor in Faculty of Information Science and Electrical Engineering, Kyushu University, He is carrying out emerging researches in the field of plasma agriculture. He found that three minutes plasma irradiation to plant seeds resulted in growth acceleration in all the growth stages as well as improving crop yields. The results can contribute issue of food crisis in the world. The excellent achievement was selected as a press release of AVS 62nd meeting and articles of IEEE Spectrum magazine, the homepage of German Physical Society and the Bulletin of the Japan Society of Applied Physics. He also established the innovative plasma nano-process that helps in understanding the nature of interaction between plasmas and nanostructures. He realized an ultra-precise deposition of a-Si:H films that can control composition ratio of Si-H and Si-H2 bonds in films. This leads to a breakthrough of a 20 years-unsolved issue of a-Si:H films.
“Contact and Doping Engineering for 2D FETs by Utilizing Oxygen Plasma Treatments”
Prof. Min Sup Choi (Chungnam Nat’l Univ., Korea)
Min Sup Choi received his B.S. degree from Materials Engineering, Sungkyunkwan University in 2010 and his Ph.D. degree from SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University in 2015. Then he joined Columbia University in 2017 to conduct collaborative research on contact, interface, and doping engineering for two-dimensional (2D) materials. He is currently at Department of Materials Science and Engineering, Chungnam National University as an assistant professor. He has authored and co-authored 30 articles in high impact journals including Nature Materials, Nature Electronics, Nature Communications, Advanced Materials, Advanced Science, ACS Nano and so on. His current research activities focus on the development of semiconductor nanodevices utilizing oxide thin films, which is being supported by Sejong Science Fellowship (funded by National Research Foundation of Korea).
“Energy-efficient Neuromorphic Systems Driven by Emerging Device Technologies”
Prof. Jiyong Woo (Kyungpook Nat'l Univ., Korea)
Jiyong Woo received the Ph.D. degree in materials science and engineering from the Pohang University of Science and Technology, Pohang, South Korea, in 2017. He is currently an assistant professor in the School of Electronics Engineering at Kyungpook National University, Daegu, South Korea.
“Physics-based Modeling and Performance Evaluation of 3D Memory Cell”
Prof. Keun Heo (Jeonbuk Nat’l Univ., Korea)
Curriculum Vitae
■ Education
■ Work Experiences
■ Education
| ᆞ 1999.03 - 2004.08 | Korea University ECE. B.S. |
|---|---|
| ᆞ 2004.09 - 2006.08 | Korea University ECE. M.S. |
| ᆞ 2011.03 - 2014.08 | Korea University ECE. Ph D. |
| ᆞ 2006.08 - 2010.12 | Samsung Electronics Semiconductor Division |
|---|---|
| ᆞ 2011.08 - 2014.08 | SAIT Frontier Research Lab |
| ᆞ 2014.09 - 2018.02 | SK Hynix Senior Engineer |
| ᆞ 2018.03 - 2021.02 | SKKU Research Professor |
| ᆞ 2021.03 - | Associate Professor, Jeonbuk National University Director, Semiconductor Process Research Center |
ᆞ AWAD Committee member (2017~).
ᆞ ICAE Committee member, Chair (2021~).
ᆞ ENGE Committee member, Chair (2020~).
ᆞ Low-dimensional material based New Memory / Photonic devices and Sensors.
ᆞ Ferroelectric material based Neuromorphic devices.
ᆞ Multiᆞvalued Logic devices and Applications
“High Performance Scene Generator for Testing of Neuromorphic Sensors”
Prof. Bruce Gnade (Mustang Optics LLC, USA)
Bruce Gnade received his BA in Chemistry from St. Louis University in 1976 and his Ph.D. in Nuclear Chemistry from the Georgia Institute of Technology in 1982. He is Professor Emeritus at UT Dallas and Chief Scientist at Mustang Optics. He was the Executive Director of the Hart Center for Engineering Leadership in the Lyle School of Engineering at SMU from 2017-2022, the Vice President for Research and the Distinguished Chair in Microelectronics at UT Dallas from 2006-2016, and a program manager in the Microsystems Technology Office at the Defense Advanced Research Projects Agency (DARPA) from 1996-1999. At Texas Instruments he led several research and technology groups from 1982-1996. His current research interests focus on electronics for harsh environments and using optical techniques to solve problems. He is a Fellow of APS, IEEE, and National Academy of Inventors, and was Chair of the Board of Directors of Oak Ridge Associated Universities from 2020-2022. He was awarded the 2021 IEEE J.J. Ebers award.
“Composite Materials in Functional and Transient Electronics”
Prof. Sang Min Won (Sungkyunkwan Univ., Korea)
ᆞ University of Illinois at Urbana Champaign B.S (2009.05)
ᆞ University of Illinois at Urbana Champaign M.S (2011.08)
ᆞ University of Illinois at Urbana Champaign Ph.D (2019.08)
ᆞ University of Illinois at Urbana Champaign Post Doc (2019.09 - 2020.01)
ᆞ SK Hynix (2011.09 - 2014.10)
ᆞ University of Illinois at Urbana Champaign M.S (2011.08)
ᆞ University of Illinois at Urbana Champaign Ph.D (2019.08)
ᆞ University of Illinois at Urbana Champaign Post Doc (2019.09 - 2020.01)
ᆞ SK Hynix (2011.09 - 2014.10)
“Mechanical Energy Harvesting Devices and Potential to Power Implantable Applications”
Prof. Hong-Joon Yoon (Gachon Univ., Korea)
EDUCATION
WORK EXPERIENCE
AWARDS AND HONORS
| ᆞ 2013. 09. ~ 2018. 08. | Master/Ph.D., Advanced Materials Science and Engineering, Sungkyunkwan University (Korea) | ᆞ 2009. 03. ~ 2013. 08. | Bachelor Department of Chemical and Biomolecular Engineering, Seoul National University Science & Technology (Korea) |
|---|
| ᆞ 2022. 09. – present | Assistant Professor Department of Electronic Engineering, Gachon University, Seongnam, Korea |
|---|---|
| ᆞ 2020. 01. – 2022. 08. | Postdoctoral Researcher Center for Bio-Integrated Electronics (CBIE), Northwestern University, IL, US (PI: Prof. John A. Rogers) |
| ᆞ 2018. 09. – 2020. 10. | Postdoctoral Researcher Advanced Materials Research Institute, Sungkyunkwan University (SKKU), Suwon, Korea (Academic advisor: Prof. Sang-Woo Kim) |
- PVSEC-30 & GPVC 2020 Best paper award, Nov. 2020
- Outstanding Poster Presentation Award, TBIS 2019, Sep. 2019
- Outstanding Poster Presentation Award, TBIS 2018, July 2018
- Top 1 STUDENT Among the Ph.D. Students, BK21 program, School of Advanced Materials of Science and Engineering, Sungkyunkwan University, Dec. 2017
- Golden Prize in 23th Human Tech Thesis Prize (1st author), SAMSUNG Electronics Co., Feb. 2017
- Outstanding Master/Ph.D Student Grand Award, BK21 program, School of Advanced Materials of Science and Engineering, Sungkyunkwan University, Korea, Dec. 2016
- Outstanding Master/Ph.D Student Silver Award, BK21 program, School of Advanced Materials of Science and Engineering, Sungkyunkwan University, Korea, Apr. 2016
- Materials Horizons, best poster award. Materials Challenges in Alternative and Renewable Energy Feb. 2015
- Outstanding Master/Ph.D Student Bronze Award, BK21 program, School of Advanced Materials of Science and Engineering, Sungkyunkwan University, Korea, Dec. 2015
- Best Poster Award, Korean Conference on Semiconductor, Korea, Feb. 2014
"Interfacial Engineering of Perovskite Optoelectronics using Functional Organic Molecules"
Prof. Min Kim (Jeonbuk Nat’l Univ., Korea)
Prof. Min Kim serves as an assistant professor at Jeonbuk National University's School of Chemical Engineering since 20.
He completed his B.S. (2008) and Ph.D. (2014) from Chemical Engineering at Pohang University of Science and Technology (POSTECH).
His postdoctoral journey took him to the Italian Institute of Technology in Milan, under Dr. Annamaria Petrozza, supported by a fellowship from Marie Skłodowska-Curie Actions.
At POSTECH, he delved into the assembly of nanostructures rooted in organic semiconductors, and during his postdoctoral phase, he expanded his research to organic-inorganic hybrid nanomaterials. Now at Jeonbuk National University, Prof. Kim's 'Nanochemical Electronics Lab' focuses on the synthesis and structural control of nanomaterials, particularly their applications in optoelectronic devices like solar cells, light-emitting devices, photodetectors, and chemical sensors. He also collaborates with the Energy-AI Convergence Graduate School, exploring the potential of machine learning to optimize solar cell and optical sensor performance.
At POSTECH, he delved into the assembly of nanostructures rooted in organic semiconductors, and during his postdoctoral phase, he expanded his research to organic-inorganic hybrid nanomaterials. Now at Jeonbuk National University, Prof. Kim's 'Nanochemical Electronics Lab' focuses on the synthesis and structural control of nanomaterials, particularly their applications in optoelectronic devices like solar cells, light-emitting devices, photodetectors, and chemical sensors. He also collaborates with the Energy-AI Convergence Graduate School, exploring the potential of machine learning to optimize solar cell and optical sensor performance.
“High Efficiency Flexible Cu-based Chalcogenide Thin Film Photovoltaics”
Dr. Donghyeop Shin (KIER, Korea)
Donghyeop Shin is currently a principal researcher of Photovoltaics Research Department at Korea Institute of Energy Research. He received his Ph.D. in Materials Science and Engineering from Korea Advanced Institute of Science and Technology in 2012 and then worked as a postdoctoral researcher at the Center for Inorganic Photovoltaic Materials from the same institute. From 2014–2017, he worked as a postdoctoral researcher in the Department of Mechanical Engineering and Materials Science and Department of Chemistry at Duke University (USA). His research interests include development of high-efficiency flexible and tandem solar cells as well as design and synthesis of novel photovoltaic materials.
“Laser-based μLED Chip Transfer Process with High Precision and High Speed”
Dr. Seungman Kim (KIMM, Korea)
Dr. Seungman Kim is a principle researcher for department of ultra-precision machines and systems, Korea Institute of Machinery and Materials(KIMM) and is an associate professor at University of Science and Technology(UST).
He is currently a team manager for the semiconductor equipment innovative center of KIMM. He has researched on optic and laser based advanced packaging processes and systems for semiconductor and display industrial applications.
He is currently a team manager for the semiconductor equipment innovative center of KIMM. He has researched on optic and laser based advanced packaging processes and systems for semiconductor and display industrial applications.
“A Finite Element Analysis Approach for Solder Joint Reliability”
Prof. Yong-Seok Lee (Myongji Univ., Korea)
Dr. Lee received a B.S. from the Korea Advanced Institute of Science and Technology (KAIST) in 2010, and an M.S. and Ph.D. in mechanical engineering from the Korea Advanced Institute of Science and Technology (KAIST) in 2012 and 2017, respectively. He is currently an assistant professor in department of mechanical engineering/ semiconductor engineering, Myongji university. Prior to joining Myongji university, he served as an assistant professor at The University of Suwon, a post-doctoral researcher at Korea Institute of Science and Technology (KIST) and a senior researcher at SK Hynix.
Dr. Lee interests span the areas of bulk / thin film mechanics and advanced manufacturing to understand the mechanical behavior of materials at different length scales and environmental conditions. He focused on developing experimental techniques (fatigue tester and micro-tensile tester at elevated temperatures or humid condition), understanding high-temperature deformation mechanisms of polycrystalline materials, and performing finite element analysis of structural systems and evaluating reliability of electronics packaging.
Dr. Lee interests span the areas of bulk / thin film mechanics and advanced manufacturing to understand the mechanical behavior of materials at different length scales and environmental conditions. He focused on developing experimental techniques (fatigue tester and micro-tensile tester at elevated temperatures or humid condition), understanding high-temperature deformation mechanisms of polycrystalline materials, and performing finite element analysis of structural systems and evaluating reliability of electronics packaging.
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