| Time / Date | January 15 (Monday) | ||
|---|---|---|---|
| 09:00-12:00 |
Tutorial Session 1 : Analytical Techniques and their Application *Organizer : Prof. HeeHwan Choe (Korea Aerospace University, Korea) Room C (Sapphire B)
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| 12:00-13:00 | Break | ||
| 13:00-13:10 | Opening Ceremony | ||
| 13:10-14:10 |
[Plenary Session 1] "Plasma Assisted Atomic Layer Etching of 2D Materials" Prof. Geun Young Yeom (Sungkyunkwan University, Korea) *Session Chair : Prof. Ho Jun Kim (Hanyang University, Korea) Room A (Emerald Hall)
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| 14:10-14:30 | Break | ||
| 14:30-16:10 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
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[Mo1A] Issues Related to Plasma Assisted Deposition *Session Chair : Prof. Geun Young Yeom (Sungkyunkwan Univ., Korea) |
[Mo1B] Evaluation Method and Computational Approaches for Low-GWP Alternative Gas *Session Chair : Prof. Heeyeop Chae (Sungkyunkwan Univ., Korea) |
[Mo1C] Advanced CMOS Technology for Next-Generation Electronics *Session Chair : Prof. Hagyoul Bae (Jeonbuk Nat'l Univ., Korea) |
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| 16:10-16:20 | Break | ||
| 16:20-17:50 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
| [Mo2A] Semiconductor Processing Monitoring *Session Chair : Prof. June Young Kim (Korea Univ., Korea) |
[Mo2C] Functional Thin-Film Technology for Future Device Applications *Session Chair : Prof. Hagyoul Bae (Jeonbuk Nat'l Univ., Korea) |
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| 17:50-18:00 | Break | ||
| 18:00-19:00 |
[Plenary Session 2] "Modeling of Modern Plasma Processing Reactors: Plasma Physics and Surface Chemistry" Dr. Igor Kaganovich (Princeton Plasma Physics Laboratory, USA) *Session Chair : Prof. Hyo-Chang Lee (Korea Aerospace University, Korea) Room A (Emerald Hall)
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| Time / Date | January 16 (Tuesday) | ||
|---|---|---|---|
| 09:00-10:00 |
[Plenary Session 3] "Recent Trends in Semiconductor Manufacturing Equipment" Ph.D. Seokmin Yun (Samsung Electronics Co., Ltd., Korea) *Session Chair : Prof. Shinjae You (Chungnam National University, Korea) Room A (Emerald Hall)
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| 10:00-10:10 | Break | ||
| 10:10-11:40 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
| [Tu1A] Status of Plasma Etching *Session Chair : Prof. Junghoon Joo (Kunsan Nat'l Univ., Korea) |
(Korean Session) [Tu1B] Plasma Processes for Alternative Gas Applications *Session Chair : Prof. Kyongnam Kim (Daejeon Univ., Korea) |
[Tu1C] Plasma Bioscience *Session Chair : Prof. Eun Ha Choi (KwangWoon Univ., Korea) |
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| 11:40-13:00 | Lunch Time | ||
| 13:00-14:00 |
[Plenary Session 4] “Asymmetry and Instability in Capacitively Coupled Plasmas Sustained in Electronegative Mixed Gases” Prof. Yuan-Hong Song (Dalian University of Technology, China) *Session Chair : Dr. Deuk-Chul Kwon (KFE, Korea) Room A (Emerald Hall)
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| 14:00-14:20 | Break | ||
| 14:20-17:40 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
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(Korean Session) Tutorial Session 2 : Atomic Layer Process (ALD & ALE) *Organizer : Prof. Hyo-Chang Lee (Korea Aerospace University, Korea) |
(Korean Session) Tutorial Session 3 : 시뮬레이션 및 진단 *Organizer : Dr. Deuk-Chul Kwon (KFE, Korea) |
[Tu2C] Interconnect and Packaging *Session Chair : Dr. Jae Hyun Park (KITECH, Korea) |
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| Break (15:50-16:00) | |||
| [Tu3C] Devices for Solar Energies *Session Chair : Prof. Taewan Kim (Jeonbuk Nat'l Univ., Korea) |
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| 17:40-19:00 | Poster Session 1 | ||
| Time / Date | January 17 (Wednesday) | ||
|---|---|---|---|
| 09:00-10:00 |
[Plenary Session 5] "Plasma Monitoring in Semiconductor Manufacturing: Yesterday, Today and Tomorrow – Tiny Things make Wonder" Dr. Yongjin Kim (SK Hynix Inc., Korea) *Session Chair : Prof. Se Youn Moon (Jeonbuk National University, Korea) Room A (Emerald Hall)
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| 10:00-10:10 | Break | ||
| 10:10-11:40 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
| [We1A] Plasma and Interfaces/ATM Plasma *Session Chair : Prof. Dongwoo Kim (Sungkyunkwan Univ., Korea) |
[We1B] Innovative Techniques for Semiconductor Processing Industries (2) *Session Chair : Dr. Seunghun Lee (KIMS, Korea) |
[We1C] Exploring Novel Phenomena in Plasma Science and Simulation *Session Chair : Prof. Sang-Young Chung (KFE, Korea) |
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| 11:40-13:00 | Lunch Time | ||
| 13:00-14:00 |
[Plenary Session 6] "Large-Scale Synthesis of 2-Dimensional Transition Metal Dichalcogenides (TMDCs) by Low-Temperature Plasma and their Applications" Prof. Taesung Kim (Sungkyunkwan Univ., Korea) *Session Chair : Prof. Yeonsang Park (Chungnam National University, Korea) Room A (Emerald Hall)
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| 14:00-14:20 | Break | ||
| 14:20-15:50 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
| [We2A] Plasma Diagnostics in Plasma Processing *Session Chair : Dr. Youngseok Lee (Chungnam Nat'l Univ., Korea) |
[We2B] Synthesis and Property Control of 2D Materials *Session Chair : Prof. Goo-Hwan Jeong (Kangwon Nat'l Univ., Korea) |
[We2C] Cutting-edge Approaches to Plasma Process Optimization and Control *Session Chair : Prof. Yeon Ho Im (Jeonbuk Nat'l Univ., Korea) |
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| 15:50-16:00 | Break | ||
| 16:00-17:40 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) |
| [We3A] Non-invasive Plasma Diagnostics *Session Chair : Dr. Min Park (KFE, Korea) |
[We3B] Characterization and Device Applications of 2D Materials *Session Chair : Prof. Yeonsang Park (Chungnam Nat'l Univ., Korea) |
[We3C] Advances in Plasma Process Simulation *Session Chair : Prof. Jianjun Shi (Fudan Univ., Korea) |
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| 17:40-19:00 | Poster Session 2 | ||
| Time / Date | January 18 (Thursday) | |||
|---|---|---|---|---|
| 09:00-10:20 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) | |
| [Th1A] Plasma Application to 2D Materials *Session Chair : Prof. Goo-Hwan Jeong (Kangwon Nat'l Univ., Korea) |
[Th1B] Towards High-Performance Flexible Electronics & Optoelectronics *Session Chair : Prof. Yei Hwan Jung (Hanyang Univ., Korea) |
[Th1C] Devices for Future Energies *Session Chair : Prof. Taewan Kim (Jeonbuk Nat'l Univ., Korea) |
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| 10:20-10:40 | Break | |||
| 10:40-12:20 | Room A (Emerald Hall) | Room B (Sapphire A) | Room C (Sapphire B) | |
| [Th2A] Plasma Diagnostics in CCP and ICP *Session Chair : Prof. Si-Jun Kim (Chungnam Nat'l Univ., Korea) |
[Th2B] Flexible Electronics for Biomedical Applications *Session Chair : Prof. Yei Hwan Jung (Hanyang Univ., Korea) |
[Th2C] Plasma Medicine and Bioscience *Session Chair : Prof. Ihn Han (KwangWoon Univ., Korea) |
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| 12:20-12:40 | Closing Ceremony
Room A (Emerald Hall)
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Organized by
Co-organized by
Sponsored by
ICMAP 2024 Secretariat
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The Korean Vacuum Society
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Representation : Jin-Hyo Boo
Address : 313, Teheran-ro, Gangnam-gu, Seoul, Republic of Korea, 1210, Seongji Heights 1