Plenary Speakers
13:00-14:00, January 15 (Monday), 2024

“Plasma Assisted Atomic Layer Etching of 2D Materials”

Prof. Geun Young Yeom

Sungkyunkwan University, Korea

Afternoon, January 15 (Monday), 2024

"Modeling of Modern Plasma Processing Reactors: Plasma Physics and Surface Chemistry"

Dr. Igor Kaganovich

Princeton Plasma Physics Laboratory, USA

9:00-10:00, January 16 (Tuesday), 2024

"Recent Trends in Semiconductor Manufacturing Equipment"

Ph.D. Seokmin Yun

Samsung Electronics Co., Ltd., Korea

13:00-14:00, January 16 (Tuesday), 2024

"Asymmetry and Instability in Capacitively Coupled Plasmas Sustained in Electronegative Mixed Gases"

Prof. Yuan-Hong Song

Dalian University of Technology, China

9:00-10:00, January 17 (Wednesday), 2024

"Plasma Monitoring in Semiconductor Manufacturing: Yesterday, Today and Tomorrow - Tiny Things make Wonder"

Dr. Yongjin Kim

SK Hynix Inc., Korea

13:00-14:00, January 17 (Wednesday), 2024

"Large-Scale Synthesis of 2-Dimensional Transition Metal Dichalcogenides (TMDCs) by Low-Temperature Plasma and their Applications"

Prof. Taesung Kim

Sungkyunkwan University, Korea